Testing Temperature Uniformity Across a Wafer Heater Surface

https://thin-film-heating.juniperbrief.com/posts/how-to-choose-a-polyimide-heater-for-precision-heating

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result